Gigabyte Z97-D3H+Intel X520-SR2 fail to enable VFs

Hi, I try to create VFs with Intel X520-SR2 on Gigabyte Z97-D3H.

I enable Intel Virualization Technology and VT-d in BIOS setting and add boot parameter "intel_iommu=on".

I use PF driver (ixgbe driver version: 4.0.3) and VF driver (ixgbevf driver version: 2.16.1) on Ubuntu 14.10 with kernel version of 3.16.0.23

After insert ixgbe and ixgbevf module, I fail to see VFs with lspci -n command.

Can anybody help me? Thank you!